Microstructured electrode arrays: a source of high-pressure nonthermal plasma

C. Penache; C. Gessner; Angela Brauning-Demian; P. Scheffler; Lutz Spielberger; O. Hohn; S. Schossler; T. Jahnke; K.-H. Gericke; Horst W. Schmidt-Boecking

doi:10.1117/12.459399

19 March 2002 Microstructured electrode arrays: a source of high-pressure nonthermal plasma

C. Penache, C. Gessner, Angela Brauning-Demian, P. Scheffler, Lutz Spielberger, O. Hohn, S. Schossler, T. Jahnke, K.-H. Gericke, Horst W. Schmidt-Boecking

Author Affiliations +

Proceedings Volume 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures; (2002) https://doi.org/10.1117/12.459399
Event: Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, 2002, Moscow, Russian Federation

Abstract

High-pressure discharges are generated using Micro-Structured Electrode (MSE) arrays with electrode distances between 50 and 250 µm. These arrays consist either of a planar electrode system bonded to a dielectric substrate or of a matrix of holes perforated in a composite sheet made out of two metallic foils separated by an insulator. Stable discharges were produced for pressures ranging from 10 to 1000 mbar using DC and radio frequency excitation. The optical appearance is that of a homogeneous glow discharge. Spectral investigations have revealed the presence of a large number density of metastable atoms and highly energetic electrons, while the discharge has a non-thermal character. The non-equilibrium high -pressure plasma provided by the MSE arrays is suitable for surface activation, thin film deposition and reduction of pollutants.

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C. Penache, C. Gessner, Angela Brauning-Demian, P. Scheffler, Lutz Spielberger, O. Hohn, S. Schossler, T. Jahnke, K.-H. Gericke, and Horst W. Schmidt-Boecking "Microstructured electrode arrays: a source of high-pressure nonthermal plasma", Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); https://doi.org/10.1117/12.459399

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