Temperature distribution model for the semiconductor dew point detector

Jerzy Weremczuk; Z. Gniazdowski; Ryszard Jachowicz; Jan M. Lysko

doi:10.1117/12.435919

8 August 2001 Temperature distribution model for the semiconductor dew point detector

Jerzy Weremczuk, Z. Gniazdowski, Ryszard Jachowicz, Jan M. Lysko

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435919
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

The simulation results of temperature distribution in the new type silicon dew point detector are presented in this paper. Calculations were done with use of the SMACEF simulation program. Fabricated structures, apart from the impedance detector used to the dew point detection, contained the resistive four terminal thermometer and two heaters. Two detector structures, the first one located on the silicon membrane and the second one placed on the bulk materials were compared in this paper.

Citation Download Citation

Jerzy Weremczuk, Z. Gniazdowski, Ryszard Jachowicz, and Jan M. Lysko "Temperature distribution model for the semiconductor dew point detector", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435919

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