PLZT-based electro-optic modules for micromachined biophotonics systems

Yasser A. Abdelaziez; Chong Hyuk Ahn

doi:10.1117/12.443110

2 October 2001 PLZT-based electro-optic modules for micromachined biophotonics systems

Yasser A. Abdelaziez, Chong Hyuk Ahn

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443110
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

In this paper we present the development and characterization of Lanthanum modified Lead Zirconate Titanate (PLZT)-based Electro-optic (EO) devices for micromacined bio-photonics systems. Spatial light modulator and Dynamic programmable microlens array have been designed, fabricated and initial results have been obtained for such applications. Fully integrating light sources, detectors and dynamic filtering in recently emerging bio-photonics and Capillary Electrophoresis (CE) systems is of immediate need. An optical module that contains such devices was made using microfabrication technologies on the optically active PLZT ceramic wafer. A PLZT wafer was polished and sandwiched and bonded between 2 plastic wafers to form such optical module. Laser micromachining was implemented to etch precise, and well aligned via holes in the plastic wafers to provide windows for light sources and electrical connections to our devices. The electro-optic coefficient for the PLZT was measured in the longitudinal configuration, where light propagates in the direction of the applied field. A mathematical expression was derived for the lens effect on the far field diffraction pattern of the dynamic microlens. Such diffraction pattern can be used to measure the focal length variation with the applied voltage. Preliminary results show the variation of focal lens with the applied voltage that ranges from 50 to 300 volts.

Citation Download Citation

Yasser A. Abdelaziez and Chong Hyuk Ahn "PLZT-based electro-optic modules for micromachined biophotonics systems", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443110

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