Productivity and OPC reticle inspectability using multibeam UV wavelength inspection

Dino Hsieh; Vincent Wen; Mark R. Laurance

doi:10.1117/12.458280

11 March 2002 Productivity and OPC reticle inspectability using multibeam UV wavelength inspection

Dino Hsieh, Vincent Wen, Mark R. Laurance

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458280
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

In order to extend the life of DUV lithography to the 130 nm design rule and below, optical proximity correction (OPC) and phase shift masks (PSM) have become increasingly common. The implementation of low k1 lithography in IC production requires inspection systems with smaller linewidth capability and higher sensitivity to obtain high yields in advanced reticle production. This paradigm presents greater inspection challenges for current UV tools. When inspections are run on advanced reticles on current tools, the number of false and nuisance defect detections are so high as to make inspecting these reticles unmanageable. The amount of de-sense required to bring false and nuisance detections down also causes real defects to be missed. The TeraStar SLF27 is the next generation reticle inspection tool from KLA-Tencor. The TeraStar addresses these problems with new algorithms that allow inspection of OPC features without desensing the detectors. Complementing this are triple-beam optics and the ability to run pattern and STARlightT inspections concurrently giving a net gain in the throughput and productivity of the tool. Here we present the first results from the use of the TeraStar in a production environment.

Citation Download Citation

Dino Hsieh, Vincent Wen, and Mark R. Laurance "Productivity and OPC reticle inspectability using multibeam UV wavelength inspection", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458280

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