Hermetic chemical vapor deposition coatings for environmental sensors

Craig A. Taylor; Wilson K.S. Chiu

doi:10.1117/12.481336

25 June 2002 Hermetic chemical vapor deposition coatings for environmental sensors

Craig A. Taylor, Wilson K.S. Chiu

Proceedings Volume 4639, Optical Fiber and Fiber Component Mechanical Reliability and Testing II; (2002) https://doi.org/10.1117/12.481336
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

Coatings on optical sensors provide protection from mechanical damage and chemical attack. In high pressure, high temperature environments, conventional polymer coatings allow hydrogen and moisture to diffuse into the fiber core, causing failure in sensors that operate in harsh environments. A hermetic carbon coating can be used in these applications to improve reliability in sensing and signal transmission, and to extend fiber life. An experimental study of thin carbon films applied by chemical vapor deposition (CVD) was conducted to determine the effects of deposition parameters on film hermeticity. The goal is to control carbon disposition in a cold walled CVD reactor by controlling the gas flow, temperature, and concentration of reaction gases within the chamber. The experiments grow carbon films by CVD of hydrocarbon precursors on stationary quartz glass rods. Smooth, pinhole free graphite films have been obtained and are desired because they prevent the diffusion of hydrogen. The carbon layers are analyzed for thickness, carbon phase, and surface roughness using ESEM and Raman Spectroscopy. The information will be combined with a numerical study to optimize the growth of graphite films on optical fibers.

Citation Download Citation

Craig A. Taylor and Wilson K.S. Chiu "Hermetic chemical vapor deposition coatings for environmental sensors", Proc. SPIE 4639, Optical Fiber and Fiber Component Mechanical Reliability and Testing II, (25 June 2002); https://doi.org/10.1117/12.481336

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