Diffractive micro-arrays for active spectroscopy and interconnect applications

James Castracane; Bai Xu; Olga N. Gutin; Rein Lavrijsen; Andrew Stollenwerk

doi:10.1117/12.469823

10 June 2002 Diffractive micro-arrays for active spectroscopy and interconnect applications

James Castracane, Bai Xu, Olga N. Gutin, Rein Lavrijsen, Andrew Stollenwerk

Proceedings Volume 4647, Functional Integration of Opto-Electro-Mechanical Devices and Systems II; (2002) https://doi.org/10.1117/12.469823
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

The use of Micro-Electro-Mechanical Systems (MEMS) technology has opened the door for many applications. In particular, by exploiting the reconfigurability of optical surfaces fabricated with this technology, many sensor, communication and spectroscopic systems can benefit. The controlled re-direction of single or multiple optical input sources can lend itself to high throughput sample analysis or massively parallel optical connectivity. In addition, the change in a MEMS-based optical surface can result in a flexible spectral analysis of incoming radiation. We report on the recent advances in our projects which are focused on the design/simulation, materials processing and integration issues involved with the creation and optimized operation of such diffractive micro-arrays. In this presentation, the state of the art in such devices will be presented which will include the process flow associated with production, structural metrology, optical performance, and parallel switching capabilities of the systems. The use of numerous materials including polysilicon, silicon dioxide and selected polymers as structural layers has enabled the production of devices which can be tailored for specific, performance related applications. Examples to be presented include diffractive surfaces with substantial (1 cm x 1 cm) active areas as well as large arrays with sub-micron feature sizes. Functional integration of the prototype devices include optical interconnects, active spectroscopy and bio/chem diagnostic systems.

Citation Download Citation

James Castracane, Bai Xu, Olga N. Gutin, Rein Lavrijsen, and Andrew Stollenwerk "Diffractive micro-arrays for active spectroscopy and interconnect applications", Proc. SPIE 4647, Functional Integration of Opto-Electro-Mechanical Devices and Systems II, (10 June 2002); https://doi.org/10.1117/12.469823

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KEYWORDS

Microopto electromechanical systems

Prototyping

Spectrometers

Electrodes

Microelectromechanical systems

Chemical elements

Spectroscopes

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