Novel Operational Regime Of High-Efficiency KrF Lasers

Minoru Obara; Tomoo Fujioka; Fumihiko Kannari; Akira Suda

doi:10.1117/12.942566

15 August 1984 Novel Operational Regime Of High-Efficiency KrF Lasers

Minoru Obara, Tomoo Fujioka, Fumihiko Kannari, Akira Suda

Proceedings Volume 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers; (1984) https://doi.org/10.1117/12.942566
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

The novel operational regime of high-efficiency KrF lasers is presented. The excitation sources are intense electron beams and intense proton beams. Theoretical evaluation of electron-beam-excited KrF laser using one atmospheric-pressure, argon-free mixtures showed that by using high-excitation-rate and shorter-excitation-pulsewidth pumping, higher intrinsic laser efficiency than conventional argon-rich, high-pressure mixtures is attainable. The experimental results are also presented.

Citation Download Citation

Minoru Obara, Tomoo Fujioka, Fumihiko Kannari, and Akira Suda "Novel Operational Regime Of High-Efficiency KrF Lasers", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); https://doi.org/10.1117/12.942566

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