Paper
19 November 2003 Control of self-writing processes in photopolymerizable resins for the fabrication of micro-optical structures
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Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530786
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
We present the investigation of 3D micro-optical structure formation in photopolymerizable polymers due to controlled self-writing processes. A locally deposited amount of energy during the material exposure leads to a local non-linear change of the refractive index. This results in self-focusing and self-guiding effects. The influence from a set of process parameters (chemical parameters, exposure conditions) on the structure formation is investigated theoretically by an iterative beam propagation method (BPM) to investigate the opportunities for a well directed usage of the self-organizing material character. The basis for this is a theoretical and experimental study of the material response towards the absorbed energy, which is presented in this paper. The experimental realization is exemplarily shown by the fabrication of high aspect ratio conic structures in ORMOCER polymers.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ulrich Streppel, Peter Dannberg, Christoph A. Waechter, and Andreas H. Braeuer "Control of self-writing processes in photopolymerizable resins for the fabrication of micro-optical structures", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530786
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KEYWORDS
Refractive index

Polymers

Process control

Beam propagation method

Photomasks

Lithography

Control systems

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