Diamond-like carbon films by pulsed-laser deposition with additional laser irradiation to plume

Tatsuya Shinozaki; Zhi Ying Chen; Toshihiko Ooie; Tetsuo Yano

doi:10.1117/12.499709

19 February 2003 Diamond-like carbon films by pulsed laser deposition with additional laser irradiation to plume

Tatsuya Shinozaki, Zhi Ying Chen, Toshihiko Ooie, Tetsuo Yano

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.499709
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

A novel technique for synthesizing a diamond-like carbon (DLC) film by pulsed laser deposition (PLD) is proposed. In the technique, additional lasers irradiated the plume in order to increase the density of the ionic carbon. By irradiating with an ArF excimer laser, the emission intensity of the atomic carbon was increased greatly. By irradiating with the third harmonic output and the fundamental output of an Nd:YAG laser, the emission intensity of the atomic and ionic carbon also increased greatly. The sp³ content increased from 51% without to 76% with two additional irradiation of the fundamental output of two Nd:YAG laser beams. The differences in the binding energy and surface morphology between the films with and without the irradiation of the additional lasers to the plume were observed by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM), respectively.

Citation Download Citation

Tatsuya Shinozaki, Zhi Ying Chen, Toshihiko Ooie, and Tetsuo Yano "Diamond-like carbon films by pulsed laser deposition with additional laser irradiation to plume", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.499709

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