Laser structuring method for MID

Masahide Muto; Yoshiyuki Uchinono; Masayuki Hirota; Toshiyuki Suzuki

doi:10.1117/12.486551

19 February 2003 Laser structuring method for MID (LAMP2002)

Masahide Muto, Yoshiyuki Uchinono, Masayuki Hirota, Toshiyuki Suzuki

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486551
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

For the increasing demand of miniaturizing electro-optical devices, Molded Interconnect Device (MID) technology has been taken interest in recent year. MID is a three-dimensional molded component on which electronic circuitry is directly fabricated. The laser structuring process on MID includes the process of forming a copper thin film on a molded component and directly removing only the contour of the circuit using a laser beam. Forming a uniform copper thin film, the laser beam diameter can be made small enough to produce fine patterns with a 50/50 micrometers track/gap combination. This method also simplifies the process by eliminating the need for the photo-resist and mask required in conventional photo imaging processes. The combination of laser wavelength and molded material is carefully selected in consider of absorption characteristic. By controlling the first pulse and designing a circuit for avoiding field concentration during plating, the molded component is successfully processed without any damages. Using this method, the world’s smallest human detection sensor, “NaPiOn” has been developed.

Citation Download Citation

Masahide Muto, Yoshiyuki Uchinono, Masayuki Hirota, and Toshiyuki Suzuki "Laser structuring method for MID (LAMP2002)", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486551

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available