Machining of micro-through-holes on glass plate by femtosecond laser pulses

Motohiro Yasui; Hikoharu Aoki; Isamu Miyamoto

doi:10.1117/12.486594

19 February 2003 Machining of micro-through-holes on glass plate by femtosecond laser pulses

Motohiro Yasui, Hikoharu Aoki, Isamu Miyamoto

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486594
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Lime-glass and silica-glass plates with thickness of 100 μm were drilled with a ultra-short pulse laser(780nm, 150fs pulses at 1kHz). The surface of the glass plate at front side and rear side were observed by SEM, and the transmitted laser power though the glass plate was measured for both of glass. The appearance of the drilled hole of lime-glass was compared with that of silica-glass. The drilling characteristics of lime-glass and silica-glass plates with thickness of 100 μm by femto-second laser pulse were studied. On rear side, the crack occurred before drilling through the plate. The crack on the rear side occurred in lime-glass at smaller shot number than in silica-glass. The transmitted laser power ratio was decreased with increasing laser intensity. Interesting phenomenon that the lower glass plate began to be drilled before the upper glass plate was drilled through, when two glass plates with air gap of 12 μm were drilled.

Citation Download Citation

Motohiro Yasui, Hikoharu Aoki, and Isamu Miyamoto "Machining of micro-through-holes on glass plate by femtosecond laser pulses", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486594

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