Performance parameter of 2D position-sensitive detector

Bin Lin; Meizhen Huang; Xiaobin Shun; Xiangqun Cao

doi:10.1117/12.471903

20 September 2002 Performance parameter of 2D position sensitive detector

Bin Lin, Meizhen Huang, Xiaobin Shun, Xiangqun Cao

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.471903
Event: Photonics Asia, 2002, Shanghai, China

Abstract

The performance parameter of 2D Position Sensitive Detector (PSD) are analyzed and calculated theoretically. The non-linearity and distortion grid map of the theoretical calculation using this structure position formula are in good agreement with the experimental result. The experimental results show that with the signal processor, the position non-linearity (rms) is less than 0.15% in the 60% range of a 13 mm x 13 mm active area, the position error is less than ±20 μm. It has demonstrated that 2D PSD was obtained the best position non-linearity results of 13 mm x 13 mm.

Citation Download Citation

Bin Lin, Meizhen Huang, Xiaobin Shun, and Xiangqun Cao "Performance parameter of 2D position sensitive detector", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.471903

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