Fabrication of three-dimensional photonics devices using femtosecond laser pulses

Matthias Will; Jonas Burghoff; Stefan Nolte; Andreas Tünnermann

doi:10.1117/12.478598

19 June 2003 Fabrication of three-dimensional photonics devices using femtosecond laser pulses

Matthias Will, Jonas Burghoff, Stefan Nolte, Andreas Tünnermann

Proceedings Volume 4978, Commercial and Biomedical Applications of Ultrafast Lasers III; (2003) https://doi.org/10.1117/12.478598
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Localized structural and refractive index modifications can be generated inside transparent solids by using focused ultrashort laser pulses, which allows for example the fabrication of optical waveguides. In this paper we present the fabrication of true three-dimensional integrated optical devices. The optical properties of the produced 3D structures as well as processing details and requirements on the positioning accuracy will be discussed. The experimental results will be compared with beam propagation simulations and limitations of this technique will be evaluated.

Citation Download Citation

Matthias Will, Jonas Burghoff, Stefan Nolte, and Andreas Tünnermann "Fabrication of three-dimensional photonics devices using femtosecond laser pulses", Proc. SPIE 4978, Commercial and Biomedical Applications of Ultrafast Lasers III, (19 June 2003); https://doi.org/10.1117/12.478598

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