Hybrid single-mode lasers fabricated using Si/SiO<sub>2</sub>/SiON micromachined platforms

Alexander Ksendzov; Kamjou Mansour

doi:10.1117/12.474361

19 June 2003 Hybrid single mode lasers fabricated using Si/SiO₂/SiON micromachined platforms

Alexander Ksendzov, Kamjou Mansour

Proceedings Volume 4987, Integrated Optics: Devices, Materials, and Technologies VII; (2003) https://doi.org/10.1117/12.474361
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

We have devised a hybridization scheme that, given suitable Fabri-Perot (F-P) gain medium, allows us to fabricate small, mechanically robust single frequency lasers in a wide spectral range, limited only by the transparency of the SiON material. In this report we discuss device fabrication and present characteristics of a laser emitting in red spectral range. The laser operates at or near room temperature under continuous wave excitation and emits 5 mW of power in single mode with 40 dB side mode suppression.

Citation Download Citation

Alexander Ksendzov and Kamjou Mansour "Hybrid single mode lasers fabricated using Si/SiO₂/SiON micromachined platforms", Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); https://doi.org/10.1117/12.474361

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