Reliability and commercialization of oxidized VCSEL

Alice Li; Jin-Shan Pan; Horng-Ching Lai; Bor-Lin Lee; Jack Wu; Yung-Sen Lin; Tai-Chan Huo; Calvin Wu; Kai-Feng Huang

doi:10.1117/12.482636

17 June 2003 Reliability and commercialization of oxidized VCSEL

Alice Li, Jin-Shan Pan, Horng-Ching Lai, Bor-Lin Lee, Jack Wu, Yung-Sen Lin, Tai-Chan Huo, Calvin Wu, Kai-Feng Huang

Proceedings Volume 4994, Vertical-Cavity Surface-Emitting Lasers VII; (2003) https://doi.org/10.1117/12.482636
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

The reliability of oxidized VCSEL has similar result to implanted VCSEL. This paper presents our work on reliability data of oxidized VCSEL device and also the comparison with implanted VCSEL. The MTTF of oxidized VCSEL is 2.73 x 10⁶ hrs at 55°C, 6 mA and failure rate ~ 1 FITs for the first 2 years operation. The reliability data of oxidized VCSEL includes activation energy, MTTF (mean-time-to failure), failure rate prediction, and 85°C / 85% humidity test will be presented below. Commercialization of oxidized VCSEL is demonstrated such as VCSEL structure, manufacturing facility, and packaging. A cost effective approach is key to its success in applications such as Datacomm.

Citation Download Citation

Alice Li, Jin-Shan Pan, Horng-Ching Lai, Bor-Lin Lee, Jack Wu, Yung-Sen Lin, Tai-Chan Huo, Calvin Wu, and Kai-Feng Huang "Reliability and commercialization of oxidized VCSEL", Proc. SPIE 4994, Vertical-Cavity Surface-Emitting Lasers VII, (17 June 2003); https://doi.org/10.1117/12.482636

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