Silicon Cylindrical Lens Arrays For Improved Photoresponse In Focal Plane Arrays

Harry G. Erhardt; James Kane; Larry S. O'Hara

doi:10.1117/12.944660

8 November 1984 Silicon Cylindrical Lens Arrays For Improved Photoresponse In Focal Plane Arrays

Harry G. Erhardt, James Kane, Larry S. O'Hara

Proceedings Volume 0501, State-of-the-Art Imaging Arrays and Their Applications; (1984) https://doi.org/10.1117/12.944660
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

A unique method of fabricating silicon lenticular lens arrays has been developed to increase the effective fill-factor ratio of infrared focal plane arrays. Results on 32 x 63 element monolithic Schottky barrier (IR-CCD) devices have demonstrated greater than a factor of two improvement in device photoresponse. These miniature lenses are repeated in a uni-directional pattern to increase the optical fill-factor (in one dimension) to effectively 100%. Large arrays of these lenses have been fabricated on three inch silicon wafers, using a single photolithography step and unique three-step etching process. A novel procedure for lens array to device mounting and alignment have been developed to maximize lens efficiency. Near optimum performance was achieved and has been demonstrated through the application of lenticular arrays to Schottky barrier IR-CCD two dimensional focal plane arrays.

Citation Download Citation

Harry G. Erhardt, James Kane, and Larry S. O'Hara "Silicon Cylindrical Lens Arrays For Improved Photoresponse In Focal Plane Arrays", Proc. SPIE 0501, State-of-the-Art Imaging Arrays and Their Applications, (8 November 1984); https://doi.org/10.1117/12.944660

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available