Indentation hardness and modulus of the surface of a large superpolished single-crystal silicon sphere

Achim J. Leistner; Anthony C. Fischer-Cripps; Jean M. Bennett

doi:10.1117/12.507234

12 December 2003 Indentation hardness and modulus of the surface of a large superpolished single-crystal silicon sphere

Achim J. Leistner, Anthony C. Fischer-Cripps, Jean M. Bennett

Proceedings Volume 5179, Optical Materials and Structures Technologies; (2003) https://doi.org/10.1117/12.507234
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Surface properties of single crystal silicon are of great interest to many people in research and development as well as in industry, particularly the semiconductor industry. In this paper we present and discuss the results of a series of nanoindentations as they relate to the elasticity and microhardness properties on the surface of a large single crystal silicon sphere. The sphere is 94 mm, it has a total roundness error of <213 nm P-V, and a super-polished surface <0.4 nm rms. The cubic structure of a silicon crystal displays different properties of hardness and elasticity in the different crystallographic planes. We present a study of the measurable differences in these mechanical properties as they relate to the <111> and the <100> directions. We show how these differences affect the overall shape of the sphere during the surface finishing process.

Citation Download Citation

Achim J. Leistner, Anthony C. Fischer-Cripps, and Jean M. Bennett "Indentation hardness and modulus of the surface of a large superpolished single-crystal silicon sphere", Proc. SPIE 5179, Optical Materials and Structures Technologies, (12 December 2003); https://doi.org/10.1117/12.507234

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