Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps

Leslie L. Gregg; Anne E. Marino; Jennifer C. Hayes; Stephen D. Jacobs

doi:10.1117/12.506849

22 December 2003 Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps

Leslie L. Gregg, Anne E. Marino, Jennifer C. Hayes, Stephen D. Jacobs

Proceedings Volume 5180, Optical Manufacturing and Testing V; (2003) https://doi.org/10.1117/12.506849
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Aluminum oxynitride (ALON) is a polycrystalline material that has proven difficult to polish due to its grain structure. Bound abrasives are an effective means for polishing ALON, and work is being done with them to obtain good surfaces, with reasonable removal rates. Laps consisting of abrasives bound in epoxy matrices were created for polishing ALON. The effects of varying abrasive type, abrasive concentration, lap shape, coolant and load were studied. Metrology procedures were developed to monitor different aspects of the grain structure and numerically evaluate grain boundary decoration. Strategies were developed to polish ALON at acceptable rates with reasonably good surface quality. Work is directed toward finding optimal bound abrasive lap formulations that can be fabricated into ring and/or contour tools for testing on CNC machining platforms.

Citation Download Citation

Leslie L. Gregg, Anne E. Marino, Jennifer C. Hayes, and Stephen D. Jacobs "Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.506849

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available