Temperature field modeling in laser-heated metals for laser cleaning of surfaces

Mihai Oane; Ileana Apostol; Adrian Timcu

doi:10.1117/12.520075

30 September 2003 Temperature field modeling in laser-heated metals for laser cleaning of surfaces

Mihai Oane, Ileana Apostol, Adrian Timcu

Proceedings Volume 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies; (2003) https://doi.org/10.1117/12.520075
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Laser induced surface cleaning is the adequate method in a large variety of industrial domains as microelectronics, optics, photonics. By comparison to chemical and/or mechanical cleaning, laser cleaning has the advantage of a very good selectivity on the surface and in depth of the material, no surface contamination, without stress in the material volume and environmental safe. It seems that laser cleaning can be developed in a method to be currently used in microelectronic industry. For an efficient laser cleaning of metallic thin films without damage of the silicon wafer, a careful optimization of the incident laser energy, fluence, intensity and number of laser pulses is needed. We have developed an analytical procedure to study the temperature fields in pulsed laser heated solids, for a deeper knowledge of the laser-thin film substrate interaction.

Citation Download Citation

Mihai Oane, Ileana Apostol, and Adrian Timcu "Temperature field modeling in laser-heated metals for laser cleaning of surfaces", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); https://doi.org/10.1117/12.520075

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available