Micromachined resonant gyroscope

Anping Qiu; Shourong Wang; Bailing Zhou

doi:10.1117/12.521461

2 September 2003 Micromachined resonant gyroscope

Anping Qiu, Shourong Wang, Bailing Zhou

Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.521461
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China

Abstract

Resonant sensing has a number of advantages, including simpler dynamics and control, improved stability, large dynamic range, high resolution, and a quasidigital FM output. Resonant sensing is attractive in micromachined gyroscope application. In this paper, we present a new micromachined resonant gyroscope and briefly introduce the basic operating principle. The double-ended tuning fork (DETF) is an important element in DETF resonator. A theoretical treatment starting from a classical theory for Bernoulli-Euler beams to modal the operation of DETF is given. T The relation between the frequency shift and the applied force is also built. The simulation and the relation of the frequency shift and the applied force by the finite element analysis (FEA) are presented. The conclusion is that analytical analysis results are very close to the simulation results by FEA. Thus, usefulness of the analytical analysis results may be more efficient for our design of micromachined resonant gyroscopes.

Citation Download Citation

Anping Qiu, Shourong Wang, and Bailing Zhou "Micromachined resonant gyroscope", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); https://doi.org/10.1117/12.521461

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