Height profile measurement by means of white light interferometry

Pavel Pavlicek

doi:10.1117/12.545112

21 November 2003 Height profile measurement by means of white light interferometry

Pavel Pavlicek

Proceedings Volume 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; (2003) https://doi.org/10.1117/12.545112
Event: 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of contemporary Optics, 2002, Krzyzowa, Poland

Abstract

White light interferometry is an established method for height profile measurement of objects. This method, unlike classical interferometry, can be used for measurement of objects with rough surface which is an important advantage. The white light interferometer is in principle a Michelson interferometer with a broad-band light source and a CCD camera as a detector. The Michelson interferometer has the object to be measured in one arm and the reference mirror in the other arm. Due to the reflection on the rough surface, a speckle pattern arises in the detector plane. This pattern is superimposed on the reference wave. The phase in particular speckle is random, but it remains approximately constant within one speckle. This renders the white light interference observable, if the optical path lengths of the two arms differ less than the coherence length. The object to be measured is mounted on a micropositioner for translating in the longitudinal direction. Gradually, as parts of the object surface cross the reference plane, the white light interference is observable in thc corresponding speckles. The position of the micropositioner in which the interference is maximal is stored for each pixel. This value for each pixel of the object image describes the geometrical shape of thc measured object. The measurement range is theoretically unlimited, practically it is limited by the range of the micropositioner. Thc longitudinal uncertainty does not depend on the parameters of the optical setup, its value is given by the roughness of the measured surface. The height profile of the object is measured during one measurement process, unlike the scanning profilers. The illumination and the observation are coaxial which avoids shadows.

Citation Download Citation

Pavel Pavlicek "Height profile measurement by means of white light interferometry", Proc. SPIE 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, (21 November 2003); https://doi.org/10.1117/12.545112

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