Enabling high-data-rate imaging applications with Grating Light Valve technology

Alexander Payne; Wilhelmus DeGroot; Robert Monteverde; David Amm

doi:10.1117/12.525886

24 January 2004 Enabling high-data-rate imaging applications with Grating Light Valve technology

Alexander Payne, Wilhelmus DeGroot, Robert Monteverde, David Amm

Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.525886
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

The Grating Light Valve diffractive MOEMS device has been successfully used in imaging applications (lithography and display) requiring image data-rates of 1-5 giga-bits per second (Gb/s). However, new applications such as maskless photolithography and high performance displays require larger pixel counts and finer control of gray-scale. This paper discusses the suitability of the GLV device for high data-rate applications. It discusses the factors governing GLV device switching speed and illustrates how these properties are optimized relative to other requirements of the imaging system.

Citation Download Citation

Alexander Payne, Wilhelmus DeGroot, Robert Monteverde, and David Amm "Enabling high-data-rate imaging applications with Grating Light Valve technology", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.525886

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