The next generation of Inchworm actuators evolves with nanometer resolution, multimillimeter range, and power-off hold

Galen David Powers; Qin Xu; James Smith

doi:10.1117/12.540055

29 July 2004 The next generation of Inchworm actuators evolves with nanometer resolution, multimillimeter range, and power-off hold

Galen David Powers, Qin Xu, James Smith

Author Affiliations +

Proceedings Volume 5388, Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies; (2004) https://doi.org/10.1117/12.540055
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

Systems that require multiple actuators for range and precision, such as adaptive optics, large optical beam control, photonics metrology, and semiconductor test-measurement, are candidates for this evolving actuator system. Designers can now consider one system to provide over 100 N force in nanometer steps at up to 50 mm/s with features such as, greater than 20 millimeter travel, power-off hold, high acceleration, and high stiffness. High mechanical power density is beneficial whether fitting an actuator into limited real estate or minimizing total mass for launch or inertia considerations. Smaller mechanical systems benefit from higher stiffness and are less susceptible to environmental transients. The actuator design uses sets of three piezoelectric elements. These constitute 1100 nF of load driven at up to 2500 Hz. In addition to the mechanical actuator, a new high efficiency amplifier and controller are being developed. Total system power density benefits will be noted and clamp design detail is presented.

Citation Download Citation

Galen David Powers, Qin Xu, and James Smith "The next generation of Inchworm actuators evolves with nanometer resolution, multimillimeter range, and power-off hold", Proc. SPIE 5388, Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies, (29 July 2004); https://doi.org/10.1117/12.540055

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