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Several aspects of thickness monitoring and turning-point prediction during deposition of the narrow band pass optical filters (NBPF) for dense-wavelength-division-multiplexing (DWDM) applications are discussed. Simplification of the method using a recurrent approach, relative transmittance fitting is presented. Partial coherence, effects of monochromator bandpass and divergence of the testing incident beam are also included. We show that the partial coherence effects in thin film structure are significant and can not be neglected. The proposed method is applicable for precise thickness monitoring and deposition control of any complex multilayer coating.
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Kamil Postava, Jaromir Pistora, M. Kojima, K. Kikuchi, K. Endo, Tomuo Yamaguchi, "New aspects of narrow bandpass optical filters for DWDM," Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.558089