Pulsed laser deposition of ZnO: comparison between deposition from Zn and ZnO target

Jaroslav Bruncko; Miroslav Michalka; Frantisek Uherek

doi:10.1117/12.563094

21 June 2004 Pulsed laser deposition of ZnO: comparison between deposition from Zn and ZnO target

Jaroslav Bruncko, Miroslav Michalka, Frantisek Uherek

Proceedings Volume 5449, Eighth International Conference on Laser and Laser Information Technologies; (2004) https://doi.org/10.1117/12.563094
Event: Eighth International Conference on Laser and Laser Information Technologies, 2003, Smolyan, Bulgaria

Abstract

ZnO thin layers are promising materials for near UV emission and absorption optical devices, mainly for its relatively wide band gap (3.4 eV at 4.2 K). However, the problems with the optimal growth of the ZnO thin layer depositions are not satisfactory solved. The aim of this study was to compare differences between the layers deposited from the pure Zn target and the target from sintered ZnO. The growth of ZnO thin layers was performed on sapphire substrate under various conditions. The layers were prepared by the pulsed laser deposition using THG Nd:YAG laser at 355 nm. Characteristics of the layers were examined using the methods of atomic force microscopy, scanning electron microscopy and energy dispersive x-ray microanalyses.

Citation Download Citation

Jaroslav Bruncko, Miroslav Michalka, and Frantisek Uherek "Pulsed laser deposition of ZnO: comparison between deposition from Zn and ZnO target", Proc. SPIE 5449, Eighth International Conference on Laser and Laser Information Technologies, (21 June 2004); https://doi.org/10.1117/12.563094

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available