Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy

Paul C. Montgomery; Cemal Draman; Wilfried Uhring; Francois Tomasini

doi:10.1117/12.545724

17 August 2004 Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy

Paul C. Montgomery, Cemal Draman, Wilfried Uhring, Francois Tomasini

Author Affiliations +

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545724
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Currently the use of white light interference microscopy for measuring static 3D surface shape typically involves the "snapshot" approach, comprising the pressing of a button and waiting for the 3D "photo". For a standard image acquisition rate of 25 to 60 i/s, the time to result can vary from a few seconds to a few minutes, depending on the depth. Deeper and larger area structures such as those of MOEMS micro-systems can take many minutes. In this work we develop the concept of real time 3D measurement (4D) of non-periodic movement by means of high speed image acquisition and processing. A dedicated high speed CCD camera and FPGA (1 million gates) imaging board processes images 512x512 pixels in size (10 bits) at a rate of 250 i/s, and displays 3D images at up to 5 i/s. A second system based on a CMOS camera has also been tested at acquisition rates of 1017 i/s, but in this case with post processing. The move from "snapshot" to "video" leads to several advantages, such as easier system optimization, higher speed measurement and new applications in the areas of the analysis of moving parts, surface chemical reactions and fragile materials.

Citation Download Citation

Paul C. Montgomery, Cemal Draman, Wilfried Uhring, and Francois Tomasini "Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545724

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available