Porous silicon filters for mid- to far-IR range

Marc Christophersen; Vladimir Kochergin; Philip R. Swinehart

doi:10.1117/12.557391

22 October 2004 Porous silicon filters for mid- to far-IR range

Marc Christophersen, Vladimir Kochergin, Philip R. Swinehart

Proceedings Volume 5524, Novel Optical Systems Design and Optimization VII; (2004) https://doi.org/10.1117/12.557391
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We present in this paper the development of novel mid-to-far IR filters that are based on porous silicon structures. The diameters of the pores in such filters are by orders of magnitude less than the central wavelength of the transmission band, leading to effective averaging of the porous structure by the light waves. Such filters have a number of important advantages over multilayer interference filters. Since the filters are made from a single material by means of an electrochemical etching process (rather than through deposition), these filters do not exhibit delamination problems and are well suited for operation at extreme temperatures (for example, in the environment of space). Our fabrication technique permits the fabrication of filters up to 200 mm (8 inches) in diameter, suitable for any wavelength from below 1.1 μm to more than 45 μm. The results of experimental testing of such filters are shown to prove the main predictions.

Citation Download Citation

Marc Christophersen, Vladimir Kochergin, and Philip R. Swinehart "Porous silicon filters for mid- to far-IR range", Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); https://doi.org/10.1117/12.557391

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