Role of laser pulse duration and ambient nitrogen pressure in deposition of AIN thin films

Carmen Ristoscu; Corina Gabriela Dorcioman; Gabriel Socol; Ion N. Mihailescu; Agryro Klini; Costas Fotakis

doi:10.1117/12.582815

21 October 2004 Role of laser pulse duration and ambient nitrogen pressure in deposition of AlN thin films

Carmen Ristoscu, Corina Gabriela Dorcioman, Gabriel Socol, Ion N. Mihailescu, Agryro Klini, Costas Fotakis

Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.582815
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania

Abstract

AlN thin films with thickness in the nanometer range were prepared by Pulsed Laser Deposition technique. The extension of PLD/RPLD for obtaining good AlN nanostructures is a consequence of high reproducibility, control of the film growth rate and stoichiometry, and low impurity contamination. We investigated in this paper the effect of laser wavelength, pulse duration, and ambient gas pressure on the composition and morphology of the deposited films. We demonstrate that we deposited stoichiometric and even textured AlN thin films by PLD from AlN targets using 3 laser sources generating pulses of 34 ns@248 nm (source A), 450 fs@248 nm (source B), and 50 fs@800 nm (source C). Plamsa investigations by Optical Emission Spectroscopy and Time-of-Flight Mass Spectrometry are in agreement with the studies of films, showing plasma richer in Al ions for source A, and the prevalent presence of AlN positive ions in the plasma generated under the action of sources B and C.

Citation Download Citation

Carmen Ristoscu, Corina Gabriela Dorcioman, Gabriel Socol, Ion N. Mihailescu, Agryro Klini, and Costas Fotakis "Role of laser pulse duration and ambient nitrogen pressure in deposition of AlN thin films", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); https://doi.org/10.1117/12.582815

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available