High-speed nanometer lapping photonics elements

Jiandong Yang; Qun Liu; Chunlin Tian

doi:10.1117/12.577984

9 February 2005 High-speed nanometer lapping photonics elements

Jiandong Yang, Qun Liu, Chunlin Tian

Proceedings Volume 5635, Nanophotonics, Nanostructure, and Nanometrology; (2005) https://doi.org/10.1117/12.577984
Event: Photonics Asia, 2004, Beijing, China

Abstract

This paper discusses some problems about nanometer lapping photonics elements. The solid abrasives high speed lapping method and the theory of lapping tool wearing uniformly are used in machining photonics elements. It makes workpiece machined surface roughness reach to Ra0.88nm, flatness reach 19nm. That not only realizes nanometer machining, but also realizes machining at high efficiency and low cost.

Citation Download Citation

Jiandong Yang, Qun Liu, and Chunlin Tian "High-speed nanometer lapping photonics elements", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); https://doi.org/10.1117/12.577984

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