Fast infrared light source with a construction of silicon microbridge

Qingde Zhuang; Ruihong Wu; Chunming Li; Kodato Setsuo; Zhan Zhang

doi:10.1117/12.573272

10 January 2005 Fast infrared light source with a construction of silicon microbridge

Qingde Zhuang, Ruihong Wu, Chunming Li, Kodato Setsuo, Zhan Zhang

Proceedings Volume 5640, Infrared Components and Their Applications; (2005) https://doi.org/10.1117/12.573272
Event: Photonics Asia, 2004, Beijing, China

Abstract

This paper introduces a new type of infrared light source constructed by silicon micro-bridge manufactured on silicon substrate using MEMS technique. Electric current flowing through the micro-bridge makes its temperature goes up and radiates infrared light as traditional lamp. A simulation of characteristics of the infrared standard source calculated by finite element method is consistent with the test value. The radiation power, depending on micro-bridge size, is obtained from 1mW to 500 mW. The infrared light source can use electric chopping instead of mechanical chopping as traditional lamp for it's fast response time with typical 4 ms.

Citation Download Citation

Qingde Zhuang, Ruihong Wu, Chunming Li, Kodato Setsuo, and Zhan Zhang "Fast infrared light source with a construction of silicon microbridge", Proc. SPIE 5640, Infrared Components and Their Applications, (10 January 2005); https://doi.org/10.1117/12.573272

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