Carbon and silica coating by UV laser spray

Toshinao Otomo; Yshikazu Yoshida; Kentaro Nakamura

doi:10.1117/12.596416

8 October 2004 Carbon and silica coating by UV laser spray

Toshinao Otomo, Yshikazu Yoshida, Kentaro Nakamura

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596416
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

A laser spray method, which melts and ablates ultra-fine powder dropped at a small angle to a focused FHG Nd: YAG laser beam in the air, has been developed. The powder contains carbon of 5 μm in diameter and silica of 0.8, 4 and 63 μm in diameter. The 30 μm diameter beam is focused on the substrate in the vicinity of a syringe outlet. The leakage beam falls on the substrate to be deposited and can be expected to perform the effect of annealing. Deposited silica coatings on nickel substrates were analyzed with a scanning electron microscopy, energy dispersive X-ray spectroscopy, and X-ray diffractometer.

Citation Download Citation

Toshinao Otomo, Yshikazu Yoshida, and Kentaro Nakamura "Carbon and silica coating by UV laser spray", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596416

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