Planar glass integrated optical structure based on prism decoupling for sensing applications

Celia A. Sanchez-Perez; Elise Ghibaudo; Jean-Emmanuel Broquin; Augusto Garcia-Valenzuela; A. Esparza-Garcia; M. A. Camacho-Lopez

doi:10.1117/12.590590

31 March 2005 Planar glass integrated optical structure based on prism decoupling for sensing applications

Celia A. Sanchez-Perez, Elise Ghibaudo, Jean-Emmanuel Broquin, Augusto Garcia-Valenzuela, A. Esparza-Garcia, M. A. Camacho-Lopez

Author Affiliations +

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.590590
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

We present the design of an innovating integrated planar structure adapted for intensity or phase measurements. It is based on the evanescent prism decoupling of the optical signal from a waveguide used as the sensing element. The device is formed by successive thin film sputtering deposition. A TiO₂ crystalline layer forms the gas sensing element from which light is coupled out by a planar high refractive index prism. We experimentally validate the structure.

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Celia A. Sanchez-Perez, Elise Ghibaudo, Jean-Emmanuel Broquin, Augusto Garcia-Valenzuela, A. Esparza-Garcia, and M. A. Camacho-Lopez "Planar glass integrated optical structure based on prism decoupling for sensing applications", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.590590

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