High-performance solar-blind AlGaN photodetectors

Ekmel Ozbay; Turgut Tut; Necmi Biyikli

doi:10.1117/12.582491

25 March 2005 High-performance solar-blind AlGaN photodetectors

Ekmel Ozbay, Turgut Tut, Necmi Biyikli

Proceedings Volume 5732, Quantum Sensing and Nanophotonic Devices II; (2005) https://doi.org/10.1117/12.582491
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Design, fabrication, and characterization of high-performance Al_xGa_1-xN-based photodetectors for solar-blind applications are reported. Al_xGa_1-xN heterostructures were designed for Schottky, p-i-n, and metal-semiconductor-metal (MSM) photodiodes. The solar-blind photodiode samples were fabricated using a microwave compatible fabrication process. The resulting devices exhibited extremely low dark currents. Below 3 fA leakage currents at 6 V and 12 V reverse bias were measured on p-i-n and Schottky photodiode samples respectively. The excellent current-voltage (I-V) characteristics led to a detectivity performance of 4.9x10¹⁴ cmHz^1/2/W^-1. The MSM devices exhibited photoconductive gain, while Schottky and p-i-n samples displayed 0.15 A/W and 0.11 A/W peak responsivity values at 267 nm and 261 nm respectively. All samples displayed true solar-blind response with cut-off wavelengths smaller than 280 nm. A visible rejection of 4x10⁴ was achieved with Schottky detector samples. High speed measurements at 267 nm resulted in fast pulse responses with >GHz bandwidths. The fastest devices were MSM photodiodes with a maximum 3-dB bandwidth of 5.4 GHz.

Citation Download Citation

Ekmel Ozbay, Turgut Tut, and Necmi Biyikli "High-performance solar-blind AlGaN photodetectors", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.582491

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available