Improvement of the lifetime of the optical coatings under high power laser irradiations

Ryuji Biro; Tetsuzo Ito; Seiji Kuwabara; Hirotaka Fukushima; Hideo Akiba; Keisui Banno; Yasuyuki Suzuki; Minoru Otani; Kazuho Sone

doi:10.1117/12.597156

12 May 2005 Improvement of the lifetime of the optical coatings under high power laser irradiations

Ryuji Biro, Tetsuzo Ito, Seiji Kuwabara, Hirotaka Fukushima, Hideo Akiba, Keisui Banno, Yasuyuki Suzuki, Minoru Otani, Kazuho Sone

Author Affiliations +

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.597156
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

To maintain high transmittance for long time use in the ArF and F₂ lithography exposure tools is highly requested, which is strongly dependent on the transmittance of the optical coatings. The following experimental fact was reported in the F₂ laser durability testing; the transmittance degradation of the optical coatings did not occur under low power laser irradiation of less than 5 mJ/cm², but a catastrophic degradation of transmittance did under high power laser irradiation over 15 mJ/cm². We have set a program to investigate the causes of the laser-induced degradation of the optical coatings. Consequently, we have found a relationship between the contaminations of the irradiation atmosphere and the transmittance degradation through various experimental conditions and analyses such as SIMS and GCMS. Finally, we have succeeded in remarkably improving the durability of the antireflection coating (ARC) by optimizing the atmospheric conditions.

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Ryuji Biro, Tetsuzo Ito, Seiji Kuwabara, Hirotaka Fukushima, Hideo Akiba, Keisui Banno, Yasuyuki Suzuki, Minoru Otani, and Kazuho Sone "Improvement of the lifetime of the optical coatings under high power laser irradiations", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.597156

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