Self-sensing structures for control of micro- and nano-cantilevers

Yuri M. Shkel; B. Ross Barmish

doi:10.1117/12.604033

16 May 2005 Self-sensing structures for control of micro- and nano-cantilevers

Yuri M. Shkel, B. Ross Barmish

Proceedings Volume 5758, Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems; (2005) https://doi.org/10.1117/12.604033
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

A sensing approach, based on resonance frequency shifts of an oscillating micro- or nano- cantilever, can potentially provide ultimate sensitivity for detection of a single molecule. However, implementation of this sensing technology on a micro-scale has intrinsic limitations: The quality, Q, of an oscillating microcantilever vibrating in air is approximately in the 30-100 range and this value dramatically drops in a liquid environment. Feedback control of the oscillations can improve the quality of the system but multiple challenges are encountered with the sensing and actuation. Traditional data acquisition approaches, which include optical, piezoresistance, piezoelectric and capacitance methods, have very limited application in signal transduction from micro- or nano- cantilever beams. In addition, electrostatic and thermal actuations are not appropriate for liquid environments. A novel approach, utilizing the self-sensing and self-actuation response of electroactive materials is proposed for control of cantilever beam vibration. As far as sensing is concerned, we exploit the fact that any dielectric material exhibits dielectrostriction effect; this is defined as variation of dielectric properties of the material with deformation. Similarly, on the actuation side electrostriction response can also be used. In this work, control challenges and approaches for such nonlinear systems with self-sensing and self-actuation capabilities will be discussed.

Citation Download Citation

Yuri M. Shkel and B. Ross Barmish "Self-sensing structures for control of micro- and nano-cantilevers", Proc. SPIE 5758, Smart Structures and Materials 2005: Smart Sensor Technology and Measurement Systems, (16 May 2005); https://doi.org/10.1117/12.604033

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KEYWORDS

Smart materials

Control systems

Sensors

Liquids

Actuators

Electrostriction

Complex systems

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