Paper
16 May 2005 Synthetic jets with piezoelectric diaphragms
Poorna Mane, Karla Mossi, Robert Bryant
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Abstract
Piezoelectric diaphragms are used as synthetic jets because of their size, rapid time response, and relatively low power consumption. Among the piezoelectric diaphragms used are unimorphs and Bimorphs. In this study, a bimorph diaphragm, a thin Unimorph pre-stressed device and a Radial Field Diaphragm (RFD) are compared. A bimorph consists of two bonded PZT discs, a thin Unimorph pre-stressed device consists of copper, PZT, and stainless steel and a Radial Field Diaphragm consist of a layer of PZT with inter-digitized electrodes encapsulated in Kapton film. The effects of driving waveform on jet velocity are studied for each of these actuators. The actuators are driven at varying frequencies and the differential pressure in the cavity is monitored.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Poorna Mane, Karla Mossi, and Robert Bryant "Synthetic jets with piezoelectric diaphragms", Proc. SPIE 5761, Smart Structures and Materials 2005: Active Materials: Behavior and Mechanics, (16 May 2005); https://doi.org/10.1117/12.599584
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Cited by 7 scholarly publications.
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KEYWORDS
Actuators

Velocity measurements

Ferroelectric materials

Electrodes

Copper

Capacitance

Manufacturing

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