Development of miniaturized piezo-hydraulic pumps

Eric G. Chapman; Scott L. Herdic; Chaz A. Keller; Christopher S. Lynch

doi:10.1117/12.605967

5 May 2005 Development of miniaturized piezo-hydraulic pumps

Eric G. Chapman, Scott L. Herdic, Chaz A. Keller, Christopher S. Lynch

Proceedings Volume 5762, Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies; (2005) https://doi.org/10.1117/12.605967
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Three small, low cost piezo-hydraulic pumps have been developed. The pumps deliver up to 600 psi of blocked pressure and 338 cc/min of free flow, while the smallest weighs less than 90 grams. The pumps utilize cofired multilayer piezoelectric actuators for low drive voltages and low cost. The properties of these pumps make them suitable for distributed actuation systems where pump, control valve and hydraulic actuator are located at the point of actuation, minimizing the system weight and length of hydraulic tubing.

Citation Download Citation

Eric G. Chapman, Scott L. Herdic, Chaz A. Keller, and Christopher S. Lynch "Development of miniaturized piezo-hydraulic pumps", Proc. SPIE 5762, Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies, (5 May 2005); https://doi.org/10.1117/12.605967

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