Design of pentacene thin film transistors on flexible substrates

Taeksoo Ji; Jining Xie; Vijay K. Varadan

doi:10.1117/12.608129

16 May 2005 Design of pentacene thin film transistors on flexible substrates

Taeksoo Ji, Jining Xie, Vijay K. Varadan

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.608129
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Organic thin film transistors using pentacene as the active material elaborated on flexible substrates are presented in this paper. Organosilane octadecyltrichlorosilane (OTS) is used to treat the gate oxide surface prior to pentacene deposition. This OTS treatment is expected to improve the device performance in terms of field-effect mobility, subthreshold slope, on/off current ratio, and threshold voltage. To pattern the organic active layer, polymer polyvinyl alcohol (PVA) that is a water-soluble polymer is used as photoresist. By using the PVA, the pentacene film can avoid exposure to harmful organic solvents or developers during patterning. The simulated results of a typical thin film resistors with gate length and width of 20μm and 200 μm, respectively, shows a field-effect mobility of 0.98cm²/Vs in the saturation region for V_DS=30V, and an on/off current ratio larger than 10⁶.

Citation Download Citation

Taeksoo Ji, Jining Xie, and Vijay K. Varadan "Design of pentacene thin film transistors on flexible substrates", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.608129

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