Paper
16 May 2005 Wilkinson power divider for antenna distribution networks
Author Affiliations +
Abstract
The design, fabrication and experimental evaluation of a Ku-Band 3 dB Wilkinson power divider on high resistivity silicon (HRS) are presented in this paper. The measured insertion for the powder divider is 3.5 dB and isolation between port 2 and 3 is 12 dB respectively. CPW lines were fabricated on two different silicon substrates (HRS, and CMOS grade silicon) and it is shown that the loss characteristics for a 50Ω CPW patterned on the surface-stabilized HRS is only 0.16 dB at 15GHz. In contrast, the insertion loss for CPW line on CMOS grade silicon is 8.3 dB at 15 GHz. Thus, the low insertion loss could be achieved by stabilizing the surface of HRS with a thin polysilicon layer.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Taeksoo Ji, Hargsoon Yoon, K. A. Jose, and Vijay K. Varadan "Wilkinson power divider for antenna distribution networks", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.608125
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Silicon

Metals

Oxides

Antennas

Electroplating

Interfaces

Amorphous silicon

Back to Top