High sensitivity photomechanical MW-LWIR imaging using an uncooled MEMS microcantilever array and optical readout

J. Zhao

doi:10.1117/12.606485

31 May 2005 High sensitivity photomechanical MW-LWIR imaging using an uncooled MEMS microcantilever array and optical readout (Invited Paper)

J. Zhao

Author Affiliations +

Proceedings Volume 5783, Infrared Technology and Applications XXXI; (2005) https://doi.org/10.1117/12.606485
Event: Defense and Security, 2005, Orlando, Florida, United States

Abstract

The value of infrared imaging in defense, security and public safety applications has been well established. A number of camera technologies have been developed and are commercially available. Yet the cost, size and power consumption of the typically cryogenically cooled cameras remain a significant impediment to more widespread deployment for these missions and extended exploitation in other fields. Agiltron has been developing a MEMS microcantilever technology offering high sensitivity and expanded operating temperature range in order to address the fundamental shortcomings of currently available technology. Here we report results achieved to date with our imagers and present an analysis of the performance potential of the architecture. We derive the fundamental mechanical limit to NEDT of this photomechanical imager architecture.

Citation Download Citation

J. Zhao "High sensitivity photomechanical MW-LWIR imaging using an uncooled MEMS microcantilever array and optical readout (Invited Paper)", Proc. SPIE 5783, Infrared Technology and Applications XXXI, (31 May 2005); https://doi.org/10.1117/12.606485

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available