Paper
19 August 2005 Reverse optimization of a Shack-Hartmann wavefront sensor
Author Affiliations +
Abstract
Reverse optimization has been used in other metrology instruments to obtain good calibration results. This paper describes three approaches for using reverse optimization with a Shack-Hartmann wavefront sensor. Two of the approaches give some insight into problems encountered in reverse optimization and a third approach, involving an aberration function model of the Shack-Hartmann wavefront sensor, resolves these issues. Simulated results are given and the approach is shown to produce calibrated wavefront measurements accurate to one part in one thousand, in the presence of significant centroid noise.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel G. Smith and John E. Greivenkamp "Reverse optimization of a Shack-Hartmann wavefront sensor", Proc. SPIE 5869, Optical Manufacturing and Testing VI, 586915 (19 August 2005); https://doi.org/10.1117/12.618190
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KEYWORDS
Calibration

Wavefront sensors

Wavefronts

Data modeling

Sensors

Lens design

Optimization (mathematics)

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