Traceable multiple sensor system for absolute form measurement

Michael Schulz; Joachim Gerhardt; Ralf D. Geckeler; Clemens Elster

doi:10.1117/12.614726

30 August 2005 Traceable multiple sensor system for absolute form measurement

Michael Schulz, Joachim Gerhardt, Ralf D. Geckeler, Clemens Elster

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 58780A (2005) https://doi.org/10.1117/12.614726
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The requirements for form or topography measurement become ever-challenging. Desired lateral resolutions are sometimes smaller than one millimeter, whereas the size of the specimen can exceed one meter. To meet these requirements, scanning measurement systems are increasingly applied with sensors being (much) smaller than the specimen. However, due to the presence of quadratic sensor and scanning stage errors, large errors of the reconstructed topographies can emerge. To overcome these problems, a novel scanning measurement system is proposed. The system includes a linear scanning stage, a compact interferometer used for multiple distance measurements and an autocollimator for additional angular measurements. The effect of quadratic sensor and first-order scanning stage errors which the system allows to eliminate is discussed. Topography reconstruction is outlined and first measurements with a demonstrator set-up are described which show that the proposed novel measurement principle works well under real measurement conditions.

Citation Download Citation

Michael Schulz, Joachim Gerhardt, Ralf D. Geckeler, and Clemens Elster "Traceable multiple sensor system for absolute form measurement", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780A (30 August 2005); https://doi.org/10.1117/12.614726

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