Monte Carlo simulation and experimental investigation of x-ray spectra from very thin metal layers on diamond substrates

Bernd David; Rainer Eckart; Gerhard Martens; Rainer Pietig; Axel Thran

doi:10.1117/12.616313

10 September 2005 Monte Carlo simulation and experimental investigation of x-ray spectra from very thin metal layers on diamond substrates

Bernd David, Rainer Eckart, Gerhard Martens, Rainer Pietig, Axel Thran

Author Affiliations +

Proceedings Volume 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; 59180T (2005) https://doi.org/10.1117/12.616313
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We used the Monte Carlo code EGSnrc to simulate electron energy loss profiles as well as angle resolved x-ray spectra for metal-layer/substrate combinations in the primary electron energy range of 60-160 keV. We were furthermore able to separate the bremsstrahlung fraction originating in the substrate from that of the metal layer. The simulations were accompanied by experimental investigations. High-energetic electrons of 60-160 keV were directed onto 1-2 μm thin tungsten layers on top of 500 μm diamond substrates. The spectra were recorded by an energy resolved detector positioned in backward direction. We compared the experimental data with the simulation results and found good agreement. An enhanced monochromaticity in backward direction however, as expected from thin film theory, has not been observed due to the influence of the substrate.

Citation Download Citation

Bernd David, Rainer Eckart, Gerhard Martens, Rainer Pietig, and Axel Thran "Monte Carlo simulation and experimental investigation of x-ray spectra from very thin metal layers on diamond substrates", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59180T (10 September 2005); https://doi.org/10.1117/12.616313

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