Chemical vapour deposition of optical coatings onto small scale complex optical components

M. L. Hitchman; D. R. Gibson; W. Manookian; E. M. Waddell

doi:10.1117/12.625178

5 October 2005 Chemical vapour deposition of optical coatings onto small scale complex optical components

M. L. Hitchman, D. R. Gibson, W. Manookian, E. M. Waddell

Proceedings Volume 5963, Advances in Optical Thin Films II; 59631G (2005) https://doi.org/10.1117/12.625178
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.

Citation Download Citation

M. L. Hitchman, D. R. Gibson, W. Manookian, and E. M. Waddell "Chemical vapour deposition of optical coatings onto small scale complex optical components", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631G (5 October 2005); https://doi.org/10.1117/12.625178

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