Method for testing small light spot produced by optical systems of high NA

Fei Zhou; Wendong Xu; Fuxi Gan

doi:10.1117/12.649829

15 September 2005 Method for testing small light spot produced by optical systems of high NA

Fei Zhou, Wendong Xu, Fuxi Gan

Proceedings Volume 5966, Seventh International Symposium on Optical Storage (ISOS 2005); 596628 (2005) https://doi.org/10.1117/12.649829
Event: Seventh International Symposium on Optical Storage (ISOS 2005), 2005, Zhanjiang, China

Abstract

We report a method for testing small light spot produced by an optical system with high numerical-aperture (NA). A high NA objective was used to converge the incident linear polarized light, and a tapered optical fiber probe with an opening of 50-80 nm mounted in the near-field optical microscopy (SNOM) apparatus was used to measure light intensity. The small light spot can be measured with high spatial resolution. The results show that a resolution of 50~100 nm can be obtained.

Citation Download Citation

Fei Zhou, Wendong Xu, and Fuxi Gan "Method for testing small light spot produced by optical systems of high NA", Proc. SPIE 5966, Seventh International Symposium on Optical Storage (ISOS 2005), 596628 (15 September 2005); https://doi.org/10.1117/12.649829

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