Watching semiconductor circuitry work

J. E. Hulse; K. Sarault; M. Simard-Normandin; N. G. Tarr; J. A. Bardwell

doi:10.1117/12.629972

14 October 2005 Watching semiconductor circuitry work

J. E. Hulse, K. Sarault, M. Simard-Normandin, N. G. Tarr, J. A. Bardwell

Proceedings Volume 5969, Photonic Applications in Biosensing and Imaging; 59692U (2005) https://doi.org/10.1117/12.629972
Event: Photonics North, 2005, Toronto, Canada

Abstract

Semiconductor devices that are not generally thought of as light sources do emit radiation in the visible and the near infrared as they operate. Observation of this electroluminescence furnishes insight into the operation of the devices and of the circuitry that they constitute but it requires an extremely sensitive light detector and picosecond time resolution. This can be achieved using a Mepsicron photodetector system that enables single photon counting time-correlated imaging with a spatial resolution of about 1 µm and a time resolution approaching 10 ps. Information extracted from the time-resolved imagery can be compared with circuit layout and topology and individual device structures and with electrical measurements that are performed concurrently. These time-correlated measurements allow signal waveforms to be determined optically, much as the waveforms measured electronically with an oscilloscope and microprobing, but with the advantage that the acquisition is entirely non-invasive. Images can be dissected in both space and time to provide information for individual components of a circuit or regions of a device. This imaging equipment has been used in our laboratory for measurements on Si, GaAsP and GaN technologies and analyses will be presented.

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J. E. Hulse, K. Sarault, M. Simard-Normandin, N. G. Tarr, and J. A. Bardwell "Watching semiconductor circuitry work", Proc. SPIE 5969, Photonic Applications in Biosensing and Imaging, 59692U (14 October 2005); https://doi.org/10.1117/12.629972

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KEYWORDS

Electroluminescence

Imaging systems

Sensors

Light emitting diodes

Luminescence

Semiconductors

Clocks

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