Paper
7 February 2006 Ion beam sputtered coatings for high fluence applications
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Abstract
Many applications are emerging that require optical coatings with the ability to withstand high fluence and that at the same time possess very low scatter and absorption loss while demonstrating resistance to environmental influences. Optical coatings fabricated with the ion beam sputtering (IBS) process possess these characteristics. This paper provides an overview of the optical and mechanical characteristics of IBS coatings and compares their laser damage threshold characteristics to coating fabricated with electron beam (e-beam) and ion assisted electron beam (IAD) techniques.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gary W. DeBell "Ion beam sputtered coatings for high fluence applications", Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 599116 (7 February 2006); https://doi.org/10.1117/12.639143
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Laser damage threshold

Optical coatings

Metals

Oxides

Electron beams

Ion beams

Thin film coatings

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