Reduction of debris and thermal destruction by use of transparent material coating method in femtosecond laser processing

Daiki Kawamura; Akihiro Takita; Hirotsugu Yamamoto; Yoshio Hayasaki; Nobuo Nishida

doi:10.1117/12.667327

29 December 2005 Reduction of debris and thermal destruction by use of transparent material coating method in femtosecond laser processing

Daiki Kawamura, Akihiro Takita, Hirotsugu Yamamoto, Yoshio Hayasaki, Nobuo Nishida

Author Affiliations +

Proceedings Volume 6028, ICO20: Lasers and Laser Technologies; 60281V (2005) https://doi.org/10.1117/12.667327
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

We investigate the morphology of a glass surface processed by tightly focused femtosecond laser pulse. Processing of a cavity with submicrometer-sized diameter is performed with irradiation laser pulse energy near a destructive threshold in air. In many cases, the cavity is surrounded by a ring-shaped protrusion, debris, and small droplets. In order to reduce the debris and the thermal destruction, we propose to process with coating a transparent material on a target material. PMMA (Poly-methyl methacrylate) is used as the transparent material. A thick PMMA film reduces dissolution and vaporization that is caused by an interaction between a high-density hot vapor plume and the target material. Furthermore, the dissolution is reduced because a low energy part in a laser pulse is reduced by sharpening the beam shape with the self-focusing of the laser pulse in the thick PMMA film. As the results, submicrometer-sized cavity that debris and the thermal destructive area are reduced dramatically is produced.

Citation Download Citation

Daiki Kawamura, Akihiro Takita, Hirotsugu Yamamoto, Yoshio Hayasaki, and Nobuo Nishida "Reduction of debris and thermal destruction by use of transparent material coating method in femtosecond laser processing", Proc. SPIE 6028, ICO20: Lasers and Laser Technologies, 60281V (29 December 2005); https://doi.org/10.1117/12.667327

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