An optical and potential dual-image CMOS sensor for bioscientific applications

Takashi Tokuda; Akio Yamamoto; Keiichiro Kagawa; Masahiro Nunoshita; Jun Ohta

doi:10.1117/12.642559

6 February 2006 An optical and potential dual-image CMOS sensor for bioscientific applications

Takashi Tokuda, Akio Yamamoto, Keiichiro Kagawa, Masahiro Nunoshita, Jun Ohta

Proceedings Volume 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII; 606802 (2006) https://doi.org/10.1117/12.642559
Event: Electronic Imaging 2006, 2006, San Jose, California, United States

Abstract

We have fabricated a CMOS image sensor which can simultaneously capture optical and on-chip potential images. The target applications of the sensor are; 1) on-chip DNA (and other biomolecular) sensing and 2) on-chip neural cell imaging. The sensor was fabricated using a 0.35μm 2-poly, 4-metals standard CMOS process. The sensor has a pixel array that consists of alternatively aligned optical sensing pixels (88×144) and potential sensing pixels (88×144). The total size of the array is QCIF (176×144). The size of the pixel is 7.5μm×7.5μm. The potential sensing pixel has a sensing electrode which capacitively couples with the measurement target on the sensor. It can be operated either in a wide-range (over 5V) mode or in a high-sensitivity (1.6mV/LSB) mode. Two-dimensional optical and potential imaging function was also demonstrated. Probes with gel tips were placed on the sensor surface and potential was applied. A potential spot with diameter smaller than 50μm was successfully observed in the dual imaging operation.

Citation Download Citation

Takashi Tokuda, Akio Yamamoto, Keiichiro Kagawa, Masahiro Nunoshita, and Jun Ohta "An optical and potential dual-image CMOS sensor for bioscientific applications", Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 606802 (6 February 2006); https://doi.org/10.1117/12.642559

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KEYWORDS

Sensors

CMOS sensors

Electrodes

Image sensors

Optical sensing

Luminescence

Imaging systems

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