Surface microfabrication of silica glass by LIBWE using DPSS-UV laser

H. Niino; Y. Kawaguchi; T. Sato; A. Narazaki; R. Kurosaki

doi:10.1117/12.654724

1 March 2006 Surface microfabrication of silica glass by LIBWE using DPSS-UV laser

H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, R. Kurosaki

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61061E (2006) https://doi.org/10.1117/12.654724
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solid-state UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of galvanometer-based point scanning system with the laser beam. The behavior of liquid ablation (explosive vaporization) was monitored by impulse pressure detection with a fast-response piezoelectric pressure gauge. LIBWE method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass as mask-less exposure system in a conventional atmospheric environment.

Citation Download Citation

H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, and R. Kurosaki "Surface microfabrication of silica glass by LIBWE using DPSS-UV laser", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061E (1 March 2006); https://doi.org/10.1117/12.654724

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